(Chemical Mechanical Polishing,化學機械研磨)
        EZ Tech can offer the turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT CMP systems & DNS scrubbers.

• Platform    : Reflexion / MirraMesa / Mirra / Mirra on track
• Application: Oxide / Tungsten
• Wafer size : 300mm / 200mm