(Etching, 蝕刻)
        EZ Tech can offer the turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT Dry ETCH systems

• Platform    : Centura AP / Centura 4.0 / Centura II / Centura I
• Chamber   : DPS II / DPS / Super E /eMxP+ / MxP+ / MxP / eMAX / ……
• Application: Poly / Metal / Oxide etch
• Wafer size : 300mm / 200mm / 150mm