Robot Overhaul/Repair - PRI ROBOT
| Application : | AMAT Tool/KLA Tool |
All Consumable parts replaced.
Cleaning/lubricate the ball screw and movement parts.
4000 data for High accuracy CCD test.
24 hours reliability Test.
| ITEM | TYPE |
| PRI ROBOT | ATM-105,ATM-107 |
| ATM-305,ATM-307 | |
| ATM-405,ATM-407,ABM-405,ABM-407 | |
| Pre-Aligner | PRE-200,200B,PRE-201,201B,PRE-300,300B,PRE-201-301B |
