(Chemical Vapor Deposition, 化學氣相沉積)
        EZ Tech can offer the turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT CVD systems

• Platform    : Producer GT / Producer SE / Producer S / Producer / Centura / P5000
• Chamber   : Twin chamber / Ultima X / Ultima+ / Ultima / CxZ / DxZ / WxZ
• Application: HDPCVD / PECVD / SACVD / WCVD
• Wafer size       : 300mm / 200mm / 150mm