Crunch prevention Buffer Lid

EZ Buffer Lid
*.Detect wafer at safe clearance from slit closing position at wafer edge.
*.Small detection beam.
*.Adjustable detection position.
*.Visible 655nm class 1 laser reflection type sensor for easy positioning.
*.Slit will not close once wafer out of position  after LL or process chambers
*.Able to detect dark dummy wafer for ETCH  WAC process.