(Chemical Vapor Deposition, 化學氣相沉積)
        EZ Tech can offer the turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for LAM (Novellus) CVD systems

• Platform    : Concept 1 / Concept 2
• Chamber : Vector / Sequel express / Sequel / Speed / Altus
• Application: HDPCVD / PECVD / WCVD
• Wafer size: 300mm / 200mm