(Physical Vapor Deposition, 物理氣相沉積)
        EZ Tech can offer the turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT PVD systems

• Platform    : AMAT Endura
• Application: AlCu / IMP / TxZ / TxZ+ / PCII / ……
• Wafer size: 300mm / 200mm / 150mm