RTP
(Rapid Thermal Processing, 快速升溫製程)
EZ Tech can offer the turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT RTP systems
EZ Tech can offer the turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT RTP systems
- Application: RTP / HTF / SiNgen / EPI / ……
- Wafer size: 300mm / 200mm