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產品介紹

RTP

(Rapid Thermal Processing, 快速升溫製程)
        EZ Tech can offer the turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT RTP systems
  • Application: RTP / HTF / SiNgen / EPI / ……
  • Wafer size: 300mm / 200mm